|  | 
| 氣體種類 | 量程 | 峰值報(bào)警 | 平均閥值報(bào)警 | 危險(xiǎn)濃度報(bào)警 |  
| 氫氣 (H 2 ) | 0...1.000 % | - | - | 0.01%vol |  
| H2 | 0...4.00 % | - | - | 0.05%vol |  
| 硫化氫(H 2 S) | 0...100ppm | 10ppm | 10ppm | 2ppm |  
| H2S | 0...30.0ppm | 10ppm | 10ppm | 0.5ppm |  
| 氯氣 (Cl 2 ) | 0...5.00ppm | 0.5ppm | 0.5ppm | 0.15ppm |  
| 一氧化碳 (CO) | 0...500ppm | 30ppm | 25ppm | 10ppm |  
| 氰化氫 (HCN) | 0...30.0ppm | 1.9ppm | 4.7ppm | 1ppm |  
| 氯化氫 (HCl) | 0...30.0ppm | 2ppm | 5ppm | 1ppm |  
| HCl | 0...30.0ppm | 2ppm | 5ppm | 1ppm |  
| 砷烷 (AsH 3 ) | 0...1.00ppm | - | 0.05ppm | 0.03ppm |  
| AsH3 | 0...1.00ppm | - | 0.05ppm | 0.03ppm |  
| AsH3 | 0...10.0ppm | - | 0.05ppm | 0.5ppm |  
| PH3 | 0...1.00ppm | 0.10ppm | 0.30ppm | 0.05ppm |  
| 磷烷 (PH 3 ) | 0...1.00ppm | 0.10ppm | 0.30ppm | 0.05ppm |  
| 乙硼烷 (B 2 H 6 ) | 0...1.00ppm | - | 0.10 ppm | 0.05ppm |  
| 硅烷(SiH 4 ) | 0...50.0ppm | - | 5ppm | 1.0ppm |  
| 氟氣 (F 2 ) | 0...5.00ppm | 0.10ppm | 0.10ppm | 0.03ppm |  
| 氟化氫(HF) | 0...10,0ppm | 2ppm | 3ppm | 0.5ppm |  
| 氨氣(NH 3 ) | 0...50ppm | 20ppm | 25ppm | 1ppm |  
| NH3 | 0...1000ppm | 20ppm | 25ppm | 15ppm |  
| NH3 | 0...100ppm | 20ppm | 25ppm | 5ppm |  
| 六甲基二硅(HMDS) | 0...0.500 % | - | - | 0.010%vol |  
| HMDS | 0...500ppm | - | - | 5ppm |  
| 溴氣 (Br 2 ) | 0...5.00ppm | - | 0,1ppm | 0.05ppm |  
| 溴化氫 (HBr) | 0...30.0ppm | 2ppm | 3ppm | 1ppm |  
| 臭氧(O 3 ) | 0...1.00ppm | 0.10ppm | 0,10ppm | 0.05ppm |  
| 二氧化氯(ClO 2 | 0...1.00ppm | 0.10ppm | 0,10ppm | 0.03ppm |  
| 三氟化氯 (ClF 3 ) | 0...1.00ppm | - | 0,10ppm | 0.03ppm |  
| 正硅酸乙(TEOS) | 0...100ppm | 10ppm | 10ppm | 5ppm |  
| 硼酸三甲酯(TMB) | 0...200ppm | - | - | 5ppm |  
| 聯(lián)氨 (N 2 H 4 ) | 0...1.00ppm | 0.10ppm | 0,01ppm | 0.02ppm |  
| 磷酸三甲酯(TMP) | 0...30.0ppm | - | 2,0ppm | 1ppm |  
| 三氟化氮(NF3) | 0...50.0ppm | - | 10ppm | 1ppm |  
| 氟甲烷(CH 3 F) | 0...0.500 % | - | - | 0.010%vol |  |